High-Q aluminum nitride photonic crystal nanobeam cavities
نویسندگان
چکیده
منابع مشابه
High Quality factor photonic crystal nanobeam cavities
We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 1.4 × 10. By detecting the cross-polarized resonantly scattered light from a normally incident...
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We present dynamically reconfigurable photonic crystal nanobeam cavities, operating at ~1550 nm, that can be continuously and reversibly tuned over a 9.5 nm wavelength range. The devices are formed by two coupled nanobeam cavities, and the tuning is achieved by varying the lateral gap between the nanobeams. An electrostatic force, obtained by applying bias voltages directly to the nanobeams, is...
متن کاملDynamically Reconfigurable Photonic Crystal Nanobeam Cavities
Wavelength-scale, high Q-factor photonic crystal cavities [1, 2] have emerged as a platform of choice for on-chip manipulation of optical signals, with applications ranging from low-power optical signal processing [3] and cavity quantum electrodynamics [4, 5] to biochemical sensing. Many of these applications, however, are limited by the fabrication tolerances and the inability to precisely con...
متن کاملUltrahigh-Q photonic crystal cavities in silicon rich nitride.
Ultrahigh-Q Photonic Crystal cavities were realized in a suspended Silicon Rich Nitride (SiNx) platform for applications at telecom wavelengths. Using a line width modulated cavity design we achieved a simulated Q of 520,000 with a modal volume of 0.77(λ/n)3. The fabricated cavities were measured using the resonance scattering technique and we demonstrated a measured Q of 120,000. The experimen...
متن کاملDeterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities.
Photonic crystal nanobeam cavities are versatile platforms of interest for optical communications, optomechanics, optofluidics, cavity QED, etc. In a previous work [Appl. Phys. Lett. 96, 203102 (2010)], we proposed a deterministic method to achieve ultrahigh Q cavities. This follow-up work provides systematic analysis and verifications of the deterministic design recipe and further extends the ...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2012
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3690888